The AIT Austrian Institute of Technology offers services for the simulation, fabrication and characterization of micro- & nanotechnological structures and devices. Our laboratories are set up with state-of-the-art equipment. Our special expertise is based on the combination of semiconductor technology and thin film processes with innovative concepts of micro-, nano- and life sciences. We would be pleased to assist you in selecting the appropriate methods and processes for tackling your technical challenges.
Mikro & Nano Characterization
Scanning probe microscopy and spectroscopy (SPM)
Atomic (AFM), chemical (CFM), magnetic (MFM) force microscopy
Imaging also possible in liquids
Scanning electron microscope (SEM)
Scanning transmission electron (STEM) detector
Back scattered electron (BSE) detector
4-points probe station
Electrical measurements up to 20 GHz
Electrochemical impedance spectroscopy
Optical setup for integrated optical waveguide devices
Mikro & Nano Fabrication
Printable materials: metals, resins, organic conductors, biofunctional inks, etc.
Substrates: polymers and metals (foil and bulk), glass, silicon, ceramics, paper, etc.
Precise deposition control for layer thicknesses 5nm - 1000nm
More than 30 different materials available: Metals, semiconductors, non-conductors
Multitarget system: for multilayers with up to eleven different materials
More than ten different materials available: metals and insulators
Electrochemical deposition of metals and semiconductors
Argon ion etching
Wet chemical etching
Oxygen plasma ashing